Vacuum Oven

The vacuum oven in use is a regular Heraeus Vacutherm oven (internal dimensions of 500 X 500 X 500 mm) with the following features:

  • Temperature range is: RT to 200 deg. C
  • Achievable vacuum is about 1 mbar
  • Feedthroughs:
    - 20 mm:  General purpose feedthrough with DN25KF flange
    - 22 mm:  General purpose feedthrough with DN25KF flange
    - 22 mm:  Feedthrough with DN25KF flange for electrical connections
    - 22 mm:  Feedthrough with DN25KF flange for liquid cooling circuit
    - 10 mm:  N2 gassupply line with Swagelok Quick connect SS-QM2-D-200 connector
  • Adapters available for DN25/40 KF connections
  • Chamber purge gas line
  • Electrical feedthrough material options:
    - 9 thermocouples
    - 7 10A, 380 V powerlines (AWG18)
    - 4x Sub-D9 connector lines (AWG20)
    - 1x one sided Sub-D9 to flying leads on DN25KF flange (5A, 300VDC)
  • 2 Aluminium alloy shelves for hardware support
  • Oil free membrane pump
Naam auteur: SSE Group
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